Fundamentals of Semiconductor Fabrication
Simon M. Sze
Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence Presents comprehensive coverage of process sequences Introduces readers to modern simulation tools Addresses the practical aspects of integrated circuit fabrication Clearly explains basic processing theory
Categorie:
Anno:
2003
Casa editrice:
Wiley
Lingua:
english
ISBN 10:
0471232793
ISBN 13:
9780471232797
File:
PDF, 58.76 MB
IPFS:
,
english, 2003
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